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Integrating CMOS and MEMS is the future

dc.contributor.authorParton, Els
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T09:39:55Z
dc.date.available2021-10-17T09:39:55Z
dc.date.issued2008-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14282
dc.sourceIIOimport
dc.titleIntegrating CMOS and MEMS is the future
dc.typeJournal article
dc.contributor.imecauthorParton, Els
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage28
dc.source.endpage29
dc.source.journalSemiconductor Manufacturing China
imec.availabilityPublished - open access


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