Show simple item record

Doping strategies for FinFETs

dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, Ray
dc.contributor.authorDe Keersgieter, An
dc.date.accessioned2021-10-17T09:44:06Z
dc.date.available2021-10-17T09:44:06Z
dc.date.issued2008
dc.identifier.issn0255-5476
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14295
dc.sourceIIOimport
dc.titleDoping strategies for FinFETs
dc.typeJournal article
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.source.peerreviewyes
dc.source.beginpage333
dc.source.endpage338
dc.source.journalMaterials Science Forum
dc.source.volume573-574
dc.identifier.urlhttp://www.scientific.net
imec.availabilityPublished - imec
imec.internalnotesRapid Thermal Processing and beyond: Applications in Semiconductor Processing


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record