dc.contributor.author | Pawlak, Bartek | |
dc.contributor.author | Duffy, Ray | |
dc.contributor.author | De Keersgieter, An | |
dc.date.accessioned | 2021-10-17T09:44:06Z | |
dc.date.available | 2021-10-17T09:44:06Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0255-5476 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14295 | |
dc.source | IIOimport | |
dc.title | Doping strategies for FinFETs | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pawlak, Bartek | |
dc.contributor.imecauthor | De Keersgieter, An | |
dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 333 | |
dc.source.endpage | 338 | |
dc.source.journal | Materials Science Forum | |
dc.source.volume | 573-574 | |
dc.identifier.url | http://www.scientific.net | |
imec.availability | Published - imec | |
imec.internalnotes | Rapid Thermal Processing and beyond: Applications in Semiconductor Processing | |