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Ni-silicides as gate electrode materials for scaled CMOS technologies

dc.contributor.authorPawlak, Malgorzata
dc.date.accessioned2021-10-17T09:44:43Z
dc.date.available2021-10-17T09:44:43Z
dc.date.issued2008-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14297
dc.sourceIIOimport
dc.titleNi-silicides as gate electrode materials for scaled CMOS technologies
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVantomme, Andre
imec.availabilityPublished - open access


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