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Fabrication of photonic components by nanoimprint technology within ePIXnet

dc.contributor.authorPlachetka, U.
dc.contributor.authorKristensen, A.
dc.contributor.authorScheerlinck, Stijn
dc.contributor.authorHuskens, J.
dc.contributor.authorKoo, N.
dc.contributor.authorKurz, H.
dc.date.accessioned2021-10-17T09:52:18Z
dc.date.available2021-10-17T09:52:18Z
dc.date.issued2008
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14319
dc.sourceIIOimport
dc.titleFabrication of photonic components by nanoimprint technology within ePIXnet
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage886
dc.source.endpage889
dc.source.journalMicroelectronic Engineering
dc.source.volume85
imec.availabilityPublished - open access


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