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Protrusion formation at the edges of ion implanted regions

dc.contributor.authorRotondaro, Antonio
dc.contributor.authorBender, Hugo
dc.contributor.authorHeyns, Marc
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-09-29T15:19:27Z
dc.date.available2021-09-29T15:19:27Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1438
dc.sourceIIOimport
dc.titleProtrusion formation at the edges of ion implanted regions
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageL118
dc.source.endpageL120
dc.source.journalJournal of the Electrochemical Society
dc.source.issue6
dc.source.volume143
imec.availabilityPublished - open access


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