Impact of repetitive and random surface morphologies on the ripple formation on ion bombarded SiGe-surfaces
dc.contributor.author | Sarkar, Subhendu | |
dc.contributor.author | Van Daele, Benny | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T10:28:56Z | |
dc.date.available | 2021-10-17T10:28:56Z | |
dc.date.issued | 2008-08 | |
dc.identifier.issn | 1367-2630 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14426 | |
dc.source | IIOimport | |
dc.title | Impact of repetitive and random surface morphologies on the ripple formation on ion bombarded SiGe-surfaces | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 83012 | |
dc.source.journal | New Journal of Physics | |
dc.source.volume | 10 | |
imec.availability | Published - open access |