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Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators

dc.contributor.authorSchrauwen, Jonathan
dc.contributor.authorVan Lysebettens, J.
dc.contributor.authorClaes, Tom
dc.contributor.authorDe Vos, Katrien
dc.contributor.authorBienstman, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-17T10:36:40Z
dc.date.available2021-10-17T10:36:40Z
dc.date.issued2008-12
dc.identifier.issn1041-1135
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14447
dc.sourceIIOimport
dc.titleFocused-ion-beam fabrication of slots in silicon waveguides and ring resonators
dc.typeJournal article
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2004
dc.source.endpage2006
dc.source.journalIEEE Photonics Technology Letters
dc.source.issue23
dc.source.volume20
imec.availabilityPublished - open access


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