dc.contributor.author | Souriau, Laurent | |
dc.contributor.author | Atanasova, Tanya | |
dc.contributor.author | Terzieva, Valentina | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T10:56:36Z | |
dc.date.available | 2021-10-17T10:56:36Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0013-4651 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14502 | |
dc.source | IIOimport | |
dc.title | Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution | |
dc.type | Journal article | |
dc.contributor.imecauthor | Souriau, Laurent | |
dc.contributor.imecauthor | Terzieva, Valentina | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Souriau, Laurent::0000-0002-5138-5938 | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | H673 | |
dc.source.endpage | H681 | |
dc.source.journal | Journal of the Electrochemical Society | |
dc.source.issue | 9 | |
dc.source.volume | 155 | |
imec.availability | Published - open access | |