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High refractive index fluid evaluations at 193 nm: Fluid lifetime and fluid/resist interaction studies

dc.contributor.authorTran, HV
dc.contributor.authorHendrickx, Eric
dc.contributor.authorFrench, RH
dc.contributor.authorAdelman, DJ
dc.contributor.authorRogado, NS
dc.contributor.authorKaku, M
dc.date.accessioned2021-10-17T11:21:47Z
dc.date.available2021-10-17T11:21:47Z
dc.date.issued2008
dc.identifier.issn0914-9244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14571
dc.sourceIIOimport
dc.titleHigh refractive index fluid evaluations at 193 nm: Fluid lifetime and fluid/resist interaction studies
dc.typeJournal article
dc.contributor.imecauthorHendrickx, Eric
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage631
dc.source.endpage639
dc.source.journalJournal of Photopolymer Science and Technology
dc.source.issue5
dc.source.volume21
imec.availabilityPublished - open access


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