Light on the road to low-k integration
| dc.contributor.author | Travaly, Youssef | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-17T11:22:29Z | |
| dc.date.available | 2021-10-17T11:22:29Z | |
| dc.date.issued | 2008-11 | |
| dc.identifier.issn | 0163-3767 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14573 | |
| dc.source | IIOimport | |
| dc.title | Light on the road to low-k integration | |
| dc.type | Journal article | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.journal | Semiconductor International | |
| imec.availability | Published - open access |