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N-type polycrystalline silicon films formed on alumina by aluminium induced crystallization and overdoping

dc.contributor.authorTüzün, Ö.
dc.contributor.authorSlaoui, A.
dc.contributor.authorGordon, Ivan
dc.contributor.authorFocsa, A.
dc.contributor.authorBallutaud, D.
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-17T11:26:30Z
dc.date.available2021-10-17T11:26:30Z
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14583
dc.sourceIIOimport
dc.titleN-type polycrystalline silicon films formed on alumina by aluminium induced crystallization and overdoping
dc.typeJournal article
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage6892
dc.source.endpage6895
dc.source.journalThin Solid Films
dc.source.issue20
dc.source.volume516
imec.availabilityPublished - open access


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