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The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple model

dc.contributor.authorVan Barel, Greg
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T11:31:27Z
dc.date.available2021-10-17T11:31:27Z
dc.date.issued2008
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14596
dc.sourceIIOimport
dc.titleThe influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple model
dc.typeJournal article
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.orcidimecDe Ceuninck, Ward::0000-0002-4630-5569
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage115027
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue11
dc.source.volume18
imec.availabilityPublished - imec


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