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Towards a generic technology for integrating MEMS with CMOS

dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorHermans, Lou
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T11:32:08Z
dc.date.available2021-10-17T11:32:08Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14598
dc.sourceIIOimport
dc.titleTowards a generic technology for integrating MEMS with CMOS
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage4
dc.source.endpage6
dc.source.journalOn-Board-Technology.com , MicroNano News
dc.source.issueApril
dc.source.volume26
imec.availabilityPublished - open access


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