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Generic integration of MEMS with CMOS

dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorHermans, Lou
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T11:32:29Z
dc.date.available2021-10-17T11:32:29Z
dc.date.issued2008
dc.identifier.issn1751-1135
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14599
dc.sourceIIOimport
dc.titleGeneric integration of MEMS with CMOS
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.source.peerreviewno
dc.source.beginpage20
dc.source.endpage22
dc.source.journalSemiconductor India
dc.source.issueSpring
imec.availabilityPublished - imec


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