Semiconductor profiling with sub-nm resolution: Chalenges and solutions

dc.contributor.author	Vandervorst, Wilfried
dc.date.accessioned	2021-10-17T12:10:12Z
dc.date.available	2021-10-17T12:10:12Z
dc.date.issued	2008
dc.identifier.issn	0169-4332
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/14698
dc.source	IIOimport
dc.title	Semiconductor profiling with sub-nm resolution: Chalenges and solutions
dc.type	Journal article
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	805
dc.source.endpage	812
dc.source.journal	Applied Surface Science
dc.source.issue	4
dc.source.volume	255
imec.availability	Published - open access