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The fate of the (reactive) primary ion: sputtering and desorption

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBerghmans, Bart
dc.date.accessioned2021-10-17T12:13:22Z
dc.date.available2021-10-17T12:13:22Z
dc.date.issued2008
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14706
dc.sourceIIOimport
dc.titleThe fate of the (reactive) primary ion: sputtering and desorption
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1206
dc.source.endpage1214
dc.source.journalApplied Surface Science
dc.source.issue4
dc.source.volume255
imec.availabilityPublished - open access
imec.internalnotes


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