Show simple item record

Towards quantitative depth profiling with high spatial and high depth resolution

dc.contributor.authorVanhove, Nico
dc.contributor.authorLievens, Peter
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T12:19:53Z
dc.date.available2021-10-17T12:19:53Z
dc.date.issued2008
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14722
dc.sourceIIOimport
dc.titleTowards quantitative depth profiling with high spatial and high depth resolution
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage1360
dc.source.endpage1363
dc.source.journalApplied Surface Science
dc.source.issue4
dc.source.volume255
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record