Towards quantitative depth profiling with high spatial and high depth resolution
dc.contributor.author | Vanhove, Nico | |
dc.contributor.author | Lievens, Peter | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T12:19:53Z | |
dc.date.available | 2021-10-17T12:19:53Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0169-4332 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14722 | |
dc.source | IIOimport | |
dc.title | Towards quantitative depth profiling with high spatial and high depth resolution | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1360 | |
dc.source.endpage | 1363 | |
dc.source.journal | Applied Surface Science | |
dc.source.issue | 4 | |
dc.source.volume | 255 | |
imec.availability | Published - imec |
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