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CMOS-MEMS integration today and tomorrow

dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T12:49:14Z
dc.date.available2021-10-17T12:49:14Z
dc.date.issued2008
dc.identifier.issn1359-6462
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14791
dc.sourceIIOimport
dc.titleCMOS-MEMS integration today and tomorrow
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage945
dc.source.endpage949
dc.source.journalScripta Materialia
dc.source.issue9
dc.source.volume59
dc.identifier.urlhttp://dx.doi.org/10.1016/j.scriptamat.2008.06.043
imec.availabilityPublished - imec


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