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Interdiffusion and crystallization in HfO2/Al2O3 superlattices

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorKesters, Jurgen
dc.contributor.authorOpsomer, Karl
dc.contributor.authorDetavernier, C.
dc.contributor.authorKittl, Jorge
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-17T21:17:06Z
dc.date.available2021-10-17T21:17:06Z
dc.date.issued2009
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14867
dc.sourceIIOimport
dc.titleInterdiffusion and crystallization in HfO2/Al2O3 superlattices
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage91911
dc.source.journalApplied Physics Letters
dc.source.issue9
dc.source.volume95
imec.availabilityPublished - open access


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