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High velocity aerosol cleaning with organic solvents: particle removal and substrate damage

dc.contributor.authorAndreas, Michael
dc.contributor.authorWostyn, Kurt
dc.contributor.authorWada, Masayuki
dc.contributor.authorJanssens, Tom
dc.contributor.authorKenis, Karine
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-17T21:17:53Z
dc.date.available2021-10-17T21:17:53Z
dc.date.issued2009
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14901
dc.sourceIIOimport
dc.titleHigh velocity aerosol cleaning with organic solvents: particle removal and substrate damage
dc.typeJournal article
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.source.peerreviewyes
dc.source.beginpage39
dc.source.endpage42
dc.source.journalSolid State Phenomena
dc.source.volume145-146
dc.identifier.urlwww.scientific.net
imec.availabilityPublished - imec
imec.internalnotesUCPSS IX (2008)


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