dc.contributor.author | Arstila, Kai | |
dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Demeulemeester, Cindy | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T21:18:19Z | |
dc.date.available | 2021-10-17T21:18:19Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14913 | |
dc.source | IIOimport | |
dc.title | Microfabricated diamond tip for nanoprobing | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1222 | |
dc.source.endpage | 1225 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 4_6 | |
dc.source.volume | 86 | |
imec.availability | Published - imec | |
imec.internalnotes | MNE 2008 | |