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Radiation damage resistance of AlGaN detectors for applications in the extreme-ultraviolet spectral range

dc.contributor.authorBarkusky, Frank
dc.contributor.authorPeth, Christian
dc.contributor.authorBayer, Armin
dc.contributor.authorMann, Klaus
dc.contributor.authorJohn, Joachim
dc.contributor.authorMalinowski, Pawel
dc.date.accessioned2021-10-17T21:20:17Z
dc.date.available2021-10-17T21:20:17Z
dc.date.issued2009
dc.identifier.issn0034-6748
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14950
dc.sourceIIOimport
dc.titleRadiation damage resistance of AlGaN detectors for applications in the extreme-ultraviolet spectral range
dc.typeJournal article
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage93102
dc.source.journalReview of Scientific Instruments
dc.source.issue9
dc.source.volume80
dc.identifier.urlhttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=RSINAK000080000009093102000001&idtype=cvips&gifs=yes
imec.availabilityPublished - open access


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