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Experimental characterization of reactive ion etched germanium diffraction gratings at 10.6 mm

dc.contributor.authorStiens, Johan
dc.contributor.authorRanson, Willy
dc.contributor.authorCottam, Ronald
dc.contributor.authorDe Tandt, Cathleen
dc.contributor.authorVounckx, Roger
dc.contributor.authorKotov, V.
dc.contributor.authorShkerdin, G.
dc.contributor.authorDhoedt, Bart
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-09-29T15:28:44Z
dc.date.available2021-09-29T15:28:44Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1508
dc.sourceIIOimport
dc.titleExperimental characterization of reactive ion etched germanium diffraction gratings at 10.6 mm
dc.typeJournal article
dc.contributor.imecauthorStiens, Johan
dc.contributor.imecauthorVounckx, Roger
dc.contributor.imecauthorDhoedt, Bart
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecDhoedt, Bart::0000-0002-7271-7479
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3453
dc.source.endpage3455
dc.source.journalApplied Physics Letters
dc.source.issue23
dc.source.volume69
imec.availabilityPublished - open access


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