Wafer level optical analysis of MEMS
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-17T21:50:22Z | |
dc.date.available | 2021-10-17T21:50:22Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | ? | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15192 | |
dc.source | IIOimport | |
dc.title | Wafer level optical analysis of MEMS | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.source.peerreview | no | |
dc.source.beginpage | 18 | |
dc.source.endpage | 19 | |
dc.source.journal | MST News | |
dc.source.issue | 1 | |
imec.availability | Published - imec |
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