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Low frequency modulated optical reflectance for the one-dimensional characterization of ultra-shallow junctions

dc.contributor.authorDortu, Fabian
dc.date.accessioned2021-10-17T22:00:25Z
dc.date.available2021-10-17T22:00:25Z
dc.date.issued2009-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15245
dc.sourceIIOimport
dc.titleLow frequency modulated optical reflectance for the one-dimensional characterization of ultra-shallow junctions
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
imec.availabilityPublished - open access


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