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Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab

dc.contributor.authorDumon, Pieter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorBaets, Roel
dc.contributor.authorFedeli, J.M.
dc.contributor.authorFulbert, L.
dc.date.accessioned2021-10-17T22:01:41Z
dc.date.available2021-10-17T22:01:41Z
dc.date.issued2009
dc.identifier.issn0013-5194
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15252
dc.sourceIIOimport
dc.titleTowards foundry approach for silicon photonics: silicon photonics platform ePIXfab
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage581
dc.source.endpage582
dc.source.journalElectronics Letters
dc.source.issue12
dc.source.volume45
imec.availabilityPublished - open access


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