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Vibration energy harvesting with aluminum nitride-based piezoelectric

dc.contributor.authorElfrink, Rene
dc.contributor.authorKamel, Talal
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorMatova, Svetla
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-17T22:04:50Z
dc.date.available2021-10-17T22:04:50Z
dc.date.issued2009
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15268
dc.sourceIIOimport
dc.titleVibration energy harvesting with aluminum nitride-based piezoelectric
dc.typeJournal article
dc.contributor.imecauthorElfrink, Rene
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage94005
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue9
dc.source.volume19
imec.availabilityPublished - open access


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