Saw tooth vernier ratchets for electrostatic inchworm actuators
dc.contributor.author | Erismis, Mehmet Akif | |
dc.contributor.author | Pereira Neves, Hercules | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | Van Hoof, Chris | |
dc.date.accessioned | 2021-10-17T22:07:59Z | |
dc.date.available | 2021-10-17T22:07:59Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0924-4247 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15282 | |
dc.source | IIOimport | |
dc.title | Saw tooth vernier ratchets for electrostatic inchworm actuators | |
dc.type | Journal article | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 66 | |
dc.source.endpage | 71 | |
dc.source.journal | Sensors and Actuators A: Physical | |
dc.source.issue | 1 | |
dc.source.volume | 156 | |
imec.availability | Published - open access |