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Saw tooth vernier ratchets for electrostatic inchworm actuators

dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-17T22:07:59Z
dc.date.available2021-10-17T22:07:59Z
dc.date.issued2009
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15282
dc.sourceIIOimport
dc.titleSaw tooth vernier ratchets for electrostatic inchworm actuators
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage66
dc.source.endpage71
dc.source.journalSensors and Actuators A: Physical
dc.source.issue1
dc.source.volume156
imec.availabilityPublished - open access


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