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Synthesis and characterisation of zeolitic films for low-k dielectric application

dc.contributor.authorEslava Fernandez, Salvador
dc.date.accessioned2021-10-17T22:08:09Z
dc.date.available2021-10-17T22:08:09Z
dc.date.issued2009-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15283
dc.sourceIIOimport
dc.titleSynthesis and characterisation of zeolitic films for low-k dielectric application
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorKirschhock, C.E.A.
dc.contributor.thesisadvisorMaex, Karen
imec.availabilityPublished - open access


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