Synthesis and characterisation of zeolitic films for low-k dielectric application
dc.contributor.author | Eslava Fernandez, Salvador | |
dc.date.accessioned | 2021-10-17T22:08:09Z | |
dc.date.available | 2021-10-17T22:08:09Z | |
dc.date.issued | 2009-01 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15283 | |
dc.source | IIOimport | |
dc.title | Synthesis and characterisation of zeolitic films for low-k dielectric application | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Kirschhock, C.E.A. | |
dc.contributor.thesisadvisor | Maex, Karen | |
imec.availability | Published - open access |