Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation
dc.contributor.author | Ghisi, Aldo | |
dc.contributor.author | Kalicinski, Stanislaw | |
dc.contributor.author | Mariani, Stefano | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Corigliano, Alberto | |
dc.date.accessioned | 2021-10-17T22:21:43Z | |
dc.date.available | 2021-10-17T22:21:43Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0960-1317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15345 | |
dc.source | IIOimport | |
dc.title | Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 35023 | |
dc.source.journal | Journal of Micromechanics and Microengineering | |
dc.source.issue | 3 | |
dc.source.volume | 19 | |
imec.availability | Published - open access |