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CMOS foundry-based micromachining

dc.contributor.authorTilmans, Harrie
dc.contributor.authorBaert, Kris
dc.contributor.authorVerbist, Agnes
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-09-29T15:32:41Z
dc.date.available2021-09-29T15:32:41Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1535
dc.sourceIIOimport
dc.titleCMOS foundry-based micromachining
dc.typeJournal article
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage122
dc.source.endpage127
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue1
dc.source.volume6
imec.availabilityPublished - open access


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