dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Demeulemeester, Cindy | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Schulz, Volker | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T22:42:04Z | |
dc.date.available | 2021-10-17T22:42:04Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0031-8965 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15431 | |
dc.source | IIOimport | |
dc.title | Conductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structures | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2077 | |
dc.source.endpage | 2081 | |
dc.source.journal | physica status solidi A | |
dc.source.issue | 9 | |
dc.source.volume | 206 | |
imec.availability | Published - imec | |