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Conductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structures

dc.contributor.authorHantschel, Thomas
dc.contributor.authorDemeulemeester, Cindy
dc.contributor.authorEyben, Pierre
dc.contributor.authorSchulz, Volker
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T22:42:04Z
dc.date.available2021-10-17T22:42:04Z
dc.date.issued2009
dc.identifier.issn0031-8965
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15431
dc.sourceIIOimport
dc.titleConductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structures
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewyes
dc.source.beginpage2077
dc.source.endpage2081
dc.source.journalphysica status solidi A
dc.source.issue9
dc.source.volume206
imec.availabilityPublished - imec


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