dc.contributor.author | Hardy, An | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Van den Rul, Heidi | |
dc.contributor.author | Van Bael, Marlies | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | D'Olieslaeger, Marc | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Kittl, Jorge | |
dc.contributor.author | Mullens, Jan | |
dc.date.accessioned | 2021-10-17T22:43:07Z | |
dc.date.available | 2021-10-17T22:43:07Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0169-4332 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15435 | |
dc.source | IIOimport | |
dc.title | Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hardy, An | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Van Bael, Marlies | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | D'Olieslaeger, Marc | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | Van Bael, Marlies::0000-0002-5516-7962 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 7812 | |
dc.source.endpage | 7817 | |
dc.source.journal | Applied Surface Science | |
dc.source.issue | 17 | |
dc.source.volume | 255 | |
imec.availability | Published - open access | |