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Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks

dc.contributor.authorKaczer, Ben
dc.contributor.authorVeloso, Anabela
dc.contributor.authorRoussel, Philippe
dc.contributor.authorGrasser, T.
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-17T23:16:47Z
dc.date.available2021-10-17T23:16:47Z
dc.date.issued2009
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15560
dc.sourceIIOimport
dc.titleInvestigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks
dc.typeJournal article
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage459
dc.source.endpage462
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume27
imec.availabilityPublished - open access
imec.internalnotesPaper from WoDiM 2008


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