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Calibration of physical resist models: methods, usability, and predictive power

dc.contributor.authorKlostermann, U.
dc.contributor.authorMülders, T.
dc.contributor.authorPonomarenco, D.
dc.contributor.authorSchmöller, T.
dc.contributor.authorVan de Kerkhove, Jeroen
dc.contributor.authorDe Bisschop, Peter
dc.date.accessioned2021-10-17T23:31:13Z
dc.date.available2021-10-17T23:31:13Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15608
dc.sourceIIOimport
dc.titleCalibration of physical resist models: methods, usability, and predictive power
dc.typeJournal article
dc.contributor.imecauthorVan de Kerkhove, Jeroen
dc.contributor.imecauthorDe Bisschop, Peter
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage33005
dc.source.journalJournal of Micro/Nanolithography, MEMS, and MOEMS
dc.source.issue3
dc.source.volume8
imec.availabilityPublished - open access


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