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Calibration of physical resist models: methods, usability, and predictive power

dc.contributor.authorKlostermann, Ulrich
dc.contributor.authorMülders, Thomas
dc.contributor.authorPonomarenco, Denis
dc.contributor.authorSchmoeller, Thomas
dc.contributor.authorVan de Kerkhove, Jeroen
dc.contributor.authorDe Bisschop, Peter
dc.date.accessioned2021-10-17T23:31:29Z
dc.date.available2021-10-17T23:31:29Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15609
dc.sourceIIOimport
dc.titleCalibration of physical resist models: methods, usability, and predictive power
dc.typeProceedings paper
dc.contributor.imecauthorVan de Kerkhove, Jeroen
dc.contributor.imecauthorDe Bisschop, Peter
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage727318
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXVI
dc.source.conferencedate22/02/2009
dc.source.conferencelocationSan Jose. CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE; Vol. 7273


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