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Nanocrystalline diamond piezoresistive sensor

dc.contributor.authorKulha, Pavel
dc.contributor.authorKromka, Alexander
dc.contributor.authorBabchenko, Oleg
dc.contributor.authorVanecek, Milan
dc.contributor.authorHusak, Miroslav
dc.contributor.authorWilliams, Oliver
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-17T23:37:20Z
dc.date.available2021-10-17T23:37:20Z
dc.date.issued2009
dc.identifier.issn0042-207X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15629
dc.sourceIIOimport
dc.titleNanocrystalline diamond piezoresistive sensor
dc.typeJournal article
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewyes
dc.source.beginpage53
dc.source.endpage56
dc.source.journalVacuum
dc.source.issue1
dc.source.volume84
imec.availabilityPublished - imec


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