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Metal gate work function control for advanced MOSFET applications

dc.contributor.authorLi, Zilan
dc.date.accessioned2021-10-18T00:01:46Z
dc.date.available2021-10-18T00:01:46Z
dc.date.issued2009-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15714
dc.sourceIIOimport
dc.titleMetal gate work function control for advanced MOSFET applications
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Meyer, Kristin
dc.contributor.thesisadvisorDe Gendt, Stefan
imec.availabilityPublished - open access


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