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Solid phase epitaxy of amorphous Ge on Si in N2 atmosphere

dc.contributor.authorLieten, Ruben
dc.contributor.authorDegroote, Stefan
dc.contributor.authorLeys, Maarten
dc.contributor.authorPosthuma, Niels
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-18T00:02:57Z
dc.date.available2021-10-18T00:02:57Z
dc.date.issued2009
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15718
dc.sourceIIOimport
dc.titleSolid phase epitaxy of amorphous Ge on Si in N2 atmosphere
dc.typeJournal article
dc.contributor.imecauthorLieten, Ruben
dc.contributor.imecauthorPosthuma, Niels
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecPosthuma, Niels::0000-0002-6029-1909
dc.source.peerreviewyes
dc.source.beginpage112113
dc.source.journalApplied Physics Letters
dc.source.issue11
dc.source.volume94
dc.identifier.urlhttp://dx.doi.org/10.1063/1.3098075
imec.availabilityPublished - imec


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