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dc.contributor.authorMagnone, Paolo
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorSubramanian, Vaidy
dc.contributor.authorParvais, Bertrand
dc.contributor.authorCollaert, Nadine
dc.contributor.authorDehan, Morin
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorBenson, Jim
dc.contributor.authorMerelle, Thomas
dc.contributor.authorLander, Rob
dc.contributor.authorCrupi, Felice
dc.contributor.authorPace, C.
dc.date.accessioned2021-10-18T00:24:02Z
dc.date.available2021-10-18T00:24:02Z
dc.date.issued2009
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15786
dc.sourceIIOimport
dc.titleMatching performance of FinFET devices with fin widths down to 10nm
dc.typeJournal article
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1374
dc.source.endpage1376
dc.source.journalIEEE Electron Device Letters
dc.source.issue12
dc.source.volume30
imec.availabilityPublished - open access


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