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Micromachined single-level nonplanar polycrystalline SiGe thermal microemitters for infrared dynamic scene projection

dc.contributor.authorMalyutenko, Volodymyr
dc.contributor.authorMalyutenko, Oleg
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-18T00:28:03Z
dc.date.available2021-10-18T00:28:03Z
dc.date.issued2009
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15798
dc.sourceIIOimport
dc.titleMicromachined single-level nonplanar polycrystalline SiGe thermal microemitters for infrared dynamic scene projection
dc.typeJournal article
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewyes
dc.source.beginpage213514
dc.source.journalApplied Physics Letters
dc.source.issue21
dc.source.volume94
imec.availabilityPublished - imec


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