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Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes

dc.contributor.authorMenou, Nicolas
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorClima, Sergiu
dc.contributor.authorOpsomer, Karl
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorKaczer, Ben
dc.contributor.authorRampelberg, Geert
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorPierreux, Dieter
dc.contributor.authorSwerts, Johan
dc.contributor.authorMaes, Jan Willem
dc.contributor.authorManger, Dirk
dc.contributor.authorBadylevich, M
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorConard, Thierry
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorWouters, Dirk
dc.contributor.authorBiesemans, Serge
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T00:44:22Z
dc.date.available2021-10-18T00:44:22Z
dc.date.issued2009
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15850
dc.sourceIIOimport
dc.titleComposition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage94101
dc.source.journalJournal of Applied Physics
dc.source.issue9
dc.source.volume106
imec.availabilityPublished - open access


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