dc.contributor.author | Provoost, Jan | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-18T01:57:41Z | |
dc.date.available | 2021-10-18T01:57:41Z | |
dc.date.issued | 2009-01 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16060 | |
dc.source | IIOimport | |
dc.title | TSV first and last: through-Si via technologies for 3D SIC and 3D WLP - part 2 | |
dc.type | Journal article | |
dc.contributor.imecauthor | Provoost, Jan | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.source.peerreview | no | |
dc.source.journal | ElectroIQ | |
dc.identifier.url | http://www.electroiq.com/index/display/packaging-article-display/351021/s-articles/s-advanced-packaging/s-packag | |
imec.availability | Published - imec | |
imec.internalnotes | http://www.electroiq.com/index/display/packaging-article-display/351021/articles/advanced-packaging/packaging0/3d-integration0/tsv/2009/01/tsv-first-and-last-through-si-via-technologies-for-3d-sic-and-3d-wlp.html | |