Giant grown-in octahedral inclusions in as-grown silicon: voids versus silicon oxide precipitates

dc.contributor.author	Vanhellemont, Jan
dc.date.accessioned	2021-09-29T15:43:55Z
dc.date.available	2021-09-29T15:43:55Z
dc.date.issued	1996
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1606
dc.source	IIOimport
dc.title	Giant grown-in octahedral inclusions in as-grown silicon: voids versus silicon oxide precipitates
dc.type	Journal article
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	4008
dc.source.endpage	4010
dc.source.journal	Applied Physics Letters
dc.source.issue	26
dc.source.volume	69
imec.availability	Published - open access