On the impact of interface energy and vacancy concentration on morphology changes and nucleation of oxide precipitates in silicon

dc.contributor.author	Vanhellemont, Jan
dc.date.accessioned	2021-09-29T15:44:04Z
dc.date.available	2021-09-29T15:44:04Z
dc.date.issued	1996
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1607
dc.source	IIOimport
dc.title	On the impact of interface energy and vacancy concentration on morphology changes and nucleation of oxide precipitates in silicon
dc.type	Journal article
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	3413
dc.source.endpage	3415
dc.source.journal	Applied Physics Letters
dc.source.issue	24
dc.source.volume	68
imec.availability	Published - open access