Show simple item record

The importance of moisture control for EOT scaling of Hf-based dielectrics

dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorBrunco, David
dc.contributor.authorYamamoto, Kazuhiko
dc.contributor.authorTokei, Zsolt
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorDelabie, Annelies
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorConard, Thierry
dc.contributor.authorRoussel, Philippe
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-18T02:07:41Z
dc.date.available2021-10-18T02:07:41Z
dc.date.issued2009
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16084
dc.sourceIIOimport
dc.titleThe importance of moisture control for EOT scaling of Hf-based dielectrics
dc.typeJournal article
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpageH416
dc.source.endpageH423
dc.source.journalJournal of the Electrochemical Society
dc.source.issue6
dc.source.volume156
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record