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Metal grating patterning on fiber facets by UV-based nano imprint and transfer lithography using optical alignment

dc.contributor.authorScheerlinck, Stijn
dc.contributor.authorDubruel, Peter
dc.contributor.authorBienstman, Peter
dc.contributor.authorSchacht, Etienne
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-18T02:40:19Z
dc.date.available2021-10-18T02:40:19Z
dc.date.issued2009-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16167
dc.sourceIIOimport
dc.titleMetal grating patterning on fiber facets by UV-based nano imprint and transfer lithography using optical alignment
dc.typeJournal article
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1415
dc.source.endpage1420
dc.source.journalIEEE J. of Lightwave Technology
dc.source.issue10
dc.source.volume27
imec.availabilityPublished - open access


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