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Fabricage van nanofotonische structuren met gefocusseerde ionenbundels. - Focussed ion beam of nanophotonic structures

dc.contributor.authorSchrauwen, Jonathan
dc.date.accessioned2021-10-18T02:45:46Z
dc.date.available2021-10-18T02:45:46Z
dc.date.issued2009-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16181
dc.sourceIIOimport
dc.titleFabricage van nanofotonische structuren met gefocusseerde ionenbundels. - Focussed ion beam of nanophotonic structures
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorVan Thourhout, Dries
imec.availabilityPublished - imec


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