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Low-loss amorphous sSilicon-on-iInsulator technology for photonic integrated circuitry

dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorSleeckx, Erik
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBogaerts, Wim
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorDumon, Pieter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-18T02:52:36Z
dc.date.available2021-10-18T02:52:36Z
dc.date.issued2009
dc.identifier.issn0030-4018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16198
dc.sourceIIOimport
dc.titleLow-loss amorphous sSilicon-on-iInsulator technology for photonic integrated circuitry
dc.typeJournal article
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewyes
dc.source.beginpage1767
dc.source.endpage1770
dc.source.journalOptics Communications
dc.source.issue9
dc.source.volume282
imec.availabilityPublished - imec


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