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Channeled ion beam synthesis: a new technique to form high-quality rare-earth silicides

dc.contributor.authorVantomme, Andre
dc.contributor.authorWu, Ming Fang
dc.contributor.authorWahl, U.
dc.contributor.authorDe Wachter, J.
dc.contributor.authorDegroote, S.
dc.contributor.authorPattyn, Hugo
dc.contributor.authorLangouche, H.
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-09-29T15:46:20Z
dc.date.available2021-09-29T15:46:20Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1619
dc.sourceIIOimport
dc.titleChanneled ion beam synthesis: a new technique to form high-quality rare-earth silicides
dc.typeJournal article
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorPattyn, Hugo
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage190
dc.source.endpage7
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.issue1_4
dc.source.volume120
imec.availabilityPublished - open access
imec.internalnotesE-MRS '96 Spring Meeting. Symposium 1 on Trneds in Ion Beam Processing of Materials. 4-7 June 1996; Strasbourg, France


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